Patent · US Active

Power semiconductor device

US12068412B2 · kind B2 · utility

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20Claims
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Assignee

Inventors

Key dates

Filing dateDec 8, 2021
Grant dateAug 20, 2024
Priority date
Expiry dateMar 15, 2043

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/83

Abstract

A power semiconductor device according to an aspect of the present disclosure includes a semiconductor layer of silicon carbide (SiC), a plurality of well regions that is disposed in the semiconductor layer, spaced from each other and has a second conductivity type, a plurality of source regions that are disposed in the semiconductor layer on the plurality of well regions respectively, spaced from each other, a drift region that has the first conductivity type and is disposed in the semiconductor layer, the drift region extending from a lower side of the plurality of well regions to a surface of the semiconductor layer through between the plurality of well regions, a plurality of trenches, a gate insulating layer, and a gate electrode layer that is disposed on the gate insulating layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.