Display device and method of manufacturing the same
US12069934B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 7, 2021 |
| Grant date | Aug 20, 2024 |
| Priority date | — |
| Expiry date | Sep 14, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K2102/351
Abstract
A method of manufacturing a display device includes forming a light emitting structure on a substrate and forming a thin film encapsulation layer on the light emitting structure by chemical vapor deposition equipment. The forming the thin film encapsulation layer includes forming a first inorganic layer and performing a first plasma treatment on a first portion of the first inorganic layer which is opposite to a second portion of the first inorganic layer facing the light emitting structure. A first raw material in the forming the first inorganic layer includes hydrogen. A second raw material in the performing the first plasma treatment exclusively consists of hydrogen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.