Electric circuitry with differently oriented ring oscillators for strain measurement
US12072254B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 20, 2020 |
| Grant date | Aug 27, 2024 |
| Priority date | — |
| Expiry date | Mar 25, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L3/045
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an embodiment an electric circuitry includes at least one first ring oscillator and at least one second ring oscillator being arranged on a substrate in different orientations, a time-to-digital converter having a converter ring oscillator and a processing circuit, wherein a first time is determined by a period duration of at least one first ring oscillator, this period duration depending on the propagation delay time of first delay elements, wherein a second time is determined by a period duration of at least one second ring oscillator, this period duration depending on the propagation delay time of second delay elements, and wherein the processing circuit is configured to determine a magnitude of the strain applied on the substrate based on a first state of the converter ring oscillator at the first time and a second state of the converter ring oscillator the second time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.