Suspension for a mems vibration sensor
US12072350B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 23, 2022 |
| Grant date | Aug 27, 2024 |
| Priority date | — |
| Expiry date | Jun 23, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/086
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An anchor assembly for a microelectromechanical systems (MEMS) vibration sensor suspension comprises an anchor body and at least one spring integrally extending from the anchor body. Each spring comprises a first section integrally extending at a first end away from the anchor body to a second end, and first lateral portions of second and third sections extending in opposite lateral directions from the second end. Each of the second and third sections includes a first leg that extends at a first end from the first lateral portion toward the anchor body, a second lateral portion that extends from a second end of the first leg away from the first section, and a second leg that extends from the second lateral portion at a first end away from the anchor body, wherein second ends of the second legs extend farther from the anchor body than the first lateral portions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.