Patent · US Active

Mo doped AlCrSiN/Mo self-lubricating films and preparation method thereof

US12077842B2 · kind B2 · utility

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11Claims

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Assignee

TIANJIN UNIVERSITY OF TECHNOLOGY AND EDUCATION (TEACHER DEVELOPMENT CENTER OF CHINA VOCATIONAL TRAINING AND GUIDANCE) · CN

Inventors

Tiegang WANG · Beijing, CN
Deqiang MENG · Nanhu, CN
Yanmei Liu · Tianjin, CN
Bing Yan · Tianjin, CN
Renren Xu · Beijing, CN
Zhaoxing Yin · Tianjin, CN

Key dates

Filing date	Mar 22, 2022
Grant date	Sep 3, 2024
Priority date	—
Expiry date	Dec 9, 2042

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/352
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Mo doped AlCrSiN/Mo self-lubricating films and a preparation method thereof are provided. The AlCrSiN/Mo self-lubricating films are prepared by doping Mo element into the AlCrSiN films, and the Mo content in the resulted films is in the range of 0.3-6.3 at. %. The films are prepared on the substrates by high power impulse magnetron sputtering (HiPIMS) and pulsed DC magnetron sputtering hybrid coating technology. The prepared AlCrSiN/Mo self-lubricating films possess high hardness, good toughness, excellent antifriction characteristics and good chemical stability.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.