Microbolometer with filtering function
US12078545B2 · kind B2 · utility
0Cited by
0References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 5, 2020 |
| Grant date | Sep 3, 2024 |
| Priority date | — |
| Expiry date | Apr 19, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2005/0077
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure relates to a microbolometer comprising an array of pixels, each pixel comprising one or more detection cells, each detection cell comprising an absorption layer (530) forming a quarter-wave cavity (533) having a height (h) of between 1.5 and 5 μm, wherein the pitch of the detection cells in at least one axis in a plane of the pixel array is in the range 2.4 h to 3.6 h.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.