Capacitive flexible tactile sensor based on graded inclined micro-cylinder structure

US12078556B2 · kind B2 · utility

Assignee

• Anhui University · CN

Inventors

• Liangpan Yang · Daguantang, CN
• Xiaohui Guo · Daguantang, CN
• Siliang Wang · Daguantang, CN
• Zhiliang Chen · Shanghai, CN
• Pengbin Gui · Daguantang, CN
• Wei Zeng · 红钢城街道, CN
• Lixia Yang · Hefei, CN
• Yaohua Xu · Daguantang, CN
• Zhixiang Haung · Daguantang, CN

Key dates

• Filing date: Dec 31, 2021
• Grant date: Sep 3, 2024
• Expiry date: Sep 20, 2042

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L1/146
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A capacitive flexible tactile sensor based on graded inclined micro-cylindrical structure, includes an upper electrode layer, a lower electrode layer and a dielectric layer between them. The dielectric layer is composed of an upper dielectric layer and a lower dielectric layer. The upper dielectric layer includes an upper dielectric layer base, upper dielectric layer long micro-cylinders and upper dielectric layer short micro-cylinders. The lower dielectric layer includes lower dielectric layer base, lower dielectric layer long micro-cylinder and lower dielectric layer short micro-cylinder. The upper dielectric layer long micro-cylinders and the lower dielectric layer long micro-cylinders are closely bonded, and there is a distance between the upper dielectric layer short micro-cylinder and the lower dielectric layer short micro-cylinder. The sensor structure of the present application is stable, overcomes the viscous effect.