Method for the detection and correction of lens distortions in an electron diffraction system
US12078603B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Apr 1, 2021 |
| Grant date | Sep 3, 2024 |
| Priority date | — |
| Expiry date | Apr 1, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/604
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for correcting distortion in a coherent electron diffraction imaging (CEDI) image induced by a projection lens makes use of a known secondary material that is imaged together with a sample of interest. Reflections generated from the secondary material are located in the image, and these observed reflections are used to approximate a beam center location. Using a known lattice structure of the secondary material, Friedel pairs are located in the image and unit cell vectors are identified. Predicted positions for each of the secondary material reflections are then determined, and the position differences between the observed reflections and the predicted reflections are used to construct a relocation function applicable to the overall image. The relocation function is then used to adjust the position of image components so as to correct for the distortion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.