Template, workpiece, and alignment method
US12078922B2 · kind B2 · utility
0Cited by
3References
20Claims
0Family size
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Key dates
| Filing date | Sep 10, 2021 |
| Grant date | Sep 3, 2024 |
| Priority date | — |
| Expiry date | Aug 13, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2223/54466
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A template of one embodiment includes an alignment mark. The alignment mark includes a first main pattern and a first auxiliary pattern. In the first main pattern, a first part and a second part are disposed according to a predetermined repeating pattern. The first auxiliary pattern is configured as a pattern opposite to the repeating pattern in a region outside an end of the first main pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.