Patent · US Active

Movement systems for sputter coating of non-flat substrates

US12080527B2 · kind B2 · utility

0Cited by

4References

17Claims

0Family size

Assignee

SOLERAS ADVANCED COATINGS BV · BE

Inventors

Wilmert De Bosscher · Drongen, BE
Ivan VAN DE PUTTE · Waregem, BE
Niek DEWILDE · Kruishoutem, BE

Key dates

Filing date	Jul 14, 2020
Grant date	Sep 3, 2024
Priority date	—
Expiry date	Feb 10, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/3323
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A movement system is provided for moving a non-flat substrate across a sputter flux distribution without circumferentially exposing the non-flat substrate to the sputter flux distribution. The movement system is arranged for a first movement of translationally transporting the non-flat substrate along the sputter flux distribution, and a second movement of translating and/or rotating the non-flat substrate with respect to the sputter flux distribution.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.