Liquid discharge device and imprint apparatus
US12083791B2 · kind B2 · utility
0Cited by
5References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 13, 2021 |
| Grant date | Sep 10, 2024 |
| Priority date | — |
| Expiry date | Dec 31, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0002
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A liquid discharge device includes a container configured to contain a liquid; a discharge port which is formed by bonding a plurality of substrates and from which the liquid supplied from the container is discharged; a piezoelectric element provided in correspondence with the discharge port, and configured to generate energy for discharging the liquid from the discharge port; and a detection unit configured to detect peeling of a bonding surface between the plurality of substrates forming the discharge port.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.