Mask plate and evaporation system
US12084754B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 5, 2022 |
| Grant date | Sep 10, 2024 |
| Priority date | — |
| Expiry date | Aug 9, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/166
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A mask plate and an evaporation system. The mask plate includes at least one mask strip. Folding structures are connected to two opposite sides of the at least one mask strip. At least one group of effective evaporation area and transition area located around the effective evaporation areas are arranged on the at least one mask strip. Each folding structure includes a foldable part and a support part connected to each other. The foldable part is connected to the support part and the mask strip. The foldable part and at least part of the support part are sequentially stacked on one side of the two opposite sides of the mask strip, and the foldable part covers at least part of the transition area close to the folding structure of the mask strip.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.