Method for detecting pressure, and pressure sensor
US12085467B2 · kind B2 · utility
0Cited by
17References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 20, 2019 |
| Grant date | Sep 10, 2024 |
| Priority date | — |
| Expiry date | Mar 14, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J41/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a method 100 for determining a pressure in a vacuum system, wherein the method comprises the steps of:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.