Spectral confocal measurement device and measurement method thereof
US12085501B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 11, 2020 |
| Grant date | Sep 10, 2024 |
| Priority date | — |
| Expiry date | Jun 11, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0635
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A spectral confocal measurement device includes a light source portion, configured to emit a broad-spectrum light beam with a certain wavelength range in a first predetermined path; an optical sampling portion, configured to converge the broad-spectrum light beam emitted from the light source portion on different measurement surfaces of an object to be measured, and output a reflected light in a second predetermined path that is different from a reverse direction of the first predetermined path; and a measurement portion, configured to receive and process the reflected light from the optical sampling portion to obtain a measurement result. The device can improve measurement accuracy and reduce production costs. In addition, a spectral confocal measurement method is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.