Superconformal recessed feature fill sol-gels
US12085744B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 24, 2022 |
| Grant date | Sep 10, 2024 |
| Priority date | — |
| Expiry date | Nov 13, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/0172
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Various systems and methods relating to a feature fill sol-gel material are provided herein. The feature fill sol-gel material may form a superconformal sol-gel coating. The feature fill sol-gel material may include a first titanium precursor composed of Titanium(IV) and an inorganic ligand. The feature fill sol-gel material may be formed by dissolving or suspending the first titanium precursor in a solvent. The feature fill sol-gel material may be annealed to form the superconformal sol-gel coating. The superconformal sol-gel coating may be an optically transparent coating having an absorbance at a wavelength of 450 nm of less than 0.2% per 150 nm and a refractive index ranging from 1.65 to 2.20.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.