Installation and relocation of mobile stocker
US12085953B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 2021 |
| Grant date | Sep 10, 2024 |
| Priority date | — |
| Expiry date | Jan 15, 2043 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G1/1371
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A mobile stocker described herein is configured to be easily installed and relocated to various locations in a semiconductor fabrication facility. The mobile stocker is capable of being programmed with, and/or autonomously learning, the layout of a semiconductor fabrication facility, and automatically relocating to a new location based on the layout using a navigation system. Accordingly, the mobile stocker is capable of being flexibly relocated in the semiconductor fabrication facility to dynamically support changes in demand and production capacity. Moreover, the capability to quickly assign a location identifier to the mobile stocker and to automatically interface with transport systems in the semiconductor fabrication facility reduces downtime of the mobile stocker, which increases productivity in the semiconductor fabrication facility.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.