Transversely-excited film bulk acoustic resonator with multi-mark interdigital transducer
US12088281B2 · kind B2 · utility
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Key dates
| Filing date | Jul 29, 2021 |
| Grant date | Sep 10, 2024 |
| Priority date | — |
| Expiry date | Jan 4, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/175
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonator devices and acoustic filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces. A portion of the back surface is attached to a substrate. The piezoelectric plate comprises a diaphragm spanning a cavity. A conductor pattern is formed on the front surface. The conductor pattern includes a multi-mark interdigital transducer (IDT), with fingers of the IDT on the diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.