Metal complexes for gas-phase thin-film deposition
US12091427B2 · kind B2 · utility
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Key dates
| Filing date | Mar 27, 2020 |
| Grant date | Sep 17, 2024 |
| Priority date | — |
| Expiry date | Jun 27, 2041 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45553
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Metal complexes of formula (I) are described: [M(L1)x(L2)y(hydra)z]n formula (I)
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.