Weighing device
US12092510B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 22, 2021 |
| Grant date | Sep 17, 2024 |
| Priority date | — |
| Expiry date | Jul 18, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/687
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Embodiments of the present application provide a weighing device that comprises a weighing unit for weighing wafers, a support structure placed on the weighing unit, at least two support platforms disposed on the support structure and each having a bearing surface for supporting peripheral regions of the wafers, and a driving part for driving the support platforms to move on the support structure, so as to adapt the at least two support platforms to bear the differently sized wafers. Since a wafer contacts merely several support platforms, cleanness of the wafer is better maintained during the weighing process; at the same time, the support platforms are enabled to stably bear differently sized wafers through adjustment of movements of the support platforms on the support structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.