Methods and devices for processing and retrieving defect information of product
US12092587B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Apr 30, 2021 |
| Grant date | Sep 17, 2024 |
| Priority date | — |
| Expiry date | Apr 30, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/9511
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure provides a method for processing defect information of a product, which includes the following steps of: acquiring defect information on a current film layer and defect information on historical film layers; determining whether defect information exists at a target location of the historical film layer if defect information exists at a target location of the current film layer; if defect information exists for a corresponding location to the target location in at least one of the historical film layers, deleting the defect information detected at the target location in the current film layer; and if no defect information exists for the target location in any of the historical film layers, retaining the defect information detected at the target location in the current film layer. According to this, for the defect information on the current film layer, only the defect information caused by factors of the current film layer may be retained, and the defect information caused by the historical film layers will not be retained, and thus, on the one hand, the stored data volume may be reduced, and on the other hand, the complexity of subsequent analysis of defect in…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.