Analysis method
US12094682B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 1, 2022 |
| Grant date | Sep 17, 2024 |
| Priority date | — |
| Expiry date | Mar 31, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2805
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
According to one embodiment, there is provided an analysis method by a scanning transmission electron microscope including a dark field detector that detects dark field images by irradiating a sample with electron beams and detecting electron beams that are transmitted through or scattered from the sample, and an electron beam detector that detects electron diffraction images at radiation points of the electron beams among the electron beams that are transmitted through the sample or scattered from detecting the electron beams transmitted through a hollow portion of the dark field detector. The analysis method includes scanning a plurality of the radiation points set in an attention area by sequentially radiating electron beams at preset incidence angles, and performing detection of dark field images of the attention area and detection of NBD images at each of the plurality of radiation points at the same time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.