Apparatuses and methods for testing semiconductor circuitry using microelectromechanical systems switches
US12099085B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 17, 2022 |
| Grant date | Sep 24, 2024 |
| Priority date | — |
| Expiry date | Nov 7, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H1/0036
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus is provided that is implemented to enable multiple tests of different types, such as a direct current (DC) test and/or a radio frequency (RF) test of a semiconductor device. The apparatus includes a microelectromechanical systems (MEMS) switch block coupled between the semiconductor device and automatic testing equipment (ATE). The apparatus is configured to enable/disable a DC path or an RF path to switch between a DC test and an RF test without reconfiguring the connections between the semiconductor device and the ATE. The DC path is used to perform a DC contact test for one or more pins of the semiconductor device. The RF path is used to perform an RF test for the semiconductor device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.