Energy-sensitive composition, cured product, and forming method of patterned cured product
US12099297B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 26, 2021 |
| Grant date | Sep 24, 2024 |
| Priority date | — |
| Expiry date | Dec 23, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0757
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
An energy-sensitive composition including a polysilane, a base generator, and a solvent, the base generator including a compound represented by formula (b1) and a photo base generator: in which Rb1 to Rb3 each independently represents a hydrogen atom, halogen atom, hydroxyl group, mercapto group, sulfide group, silyl group, silanol group, nitro group, nitroso group, sulfonato group, phosphino group, phosphinyl group, phosphonato group or organic group; Rb4 and Rb5 each independently represent a hydrogen atom, halogen atom, hydroxyl group, mercapto group, sulfide group, silyl group, silanol group, nitro group, nitroso group, sulfino group, sulfo group, sulfonato group, phosphino group, phosphinyl group, phosphono group, phosphonato group or aliphatic group; and Rb6 represents a hydrogen atom, alkyl group or alkoxy group.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.