Vacuum valve
US12104715B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 9, 2022 |
| Grant date | Oct 1, 2024 |
| Priority date | — |
| Expiry date | Sep 21, 2042 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K2200/101
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A vacuum valve for high/ultra-high vacuum systems includes a valve housing defining a passage connecting a first and a second opening of the housing. A valve body and a complementary seat is disposed in the passage, the valve body and/or the seat including a seal and the valve body being movable in a linear axial direction along between an open position and a closed position. The valve body cooperates with the seat in the closed position so as to close the first opening gas-tightly. An electromechanical actuation unit for actuating the valve body includes an electric motor and a mechanical conversion unit with an input portion drivingly connected to the motor and an output portion drivingly connected to the valve body. The conversion unit converts a rotational output of the electrical motor into a linear movement of an output portion to move the valve body in the axial direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.