Micromachined gyroscope and electronic product using same
US12104905B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 3, 2022 |
| Grant date | Oct 1, 2024 |
| Priority date | — |
| Expiry date | May 24, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5733
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention provides a micromachined gyroscope. The micromachined gyroscope includes a driving structure, a detection structure and a connection component. The driving structure includes a first moving component and a driving component. The driving component is used to drive the movement of the first moving component. The detection structure includes a second moving component and a detection component installed in the second moving component. The detection component is used to detect the movement distance of the second moving component along the third or fourth direction. The driving component is installed inside the first moving component, and the detection component is installed inside the second moving component. Greater drive of amplitude can be achieved at the same drive voltage, thereby increasing the sensitivity of the micromachined gyroscope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.