Portable optic metrology thermal chamber module and method therefor
US12104975B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 25, 2023 |
| Grant date | Oct 1, 2024 |
| Priority date | — |
| Expiry date | Apr 25, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/0147
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A portable optic metrology thermal chamber module including a housing defining a thermal chamber, with a thermally isolated environment arranged for holding an optic device under test, the housing having an optic stimulus entry aperture configured for entry of a stimulus beam, from a metrology system stimulus source through the entry aperture onto an entry pupil of the device to an image analyzer, and a module mount coupling to modularly mount the portable optic metrology thermal chamber module to a support of a metrology system of the metrology system stimulus source so as to removably couple the portable optic metrology thermal chamber module as a unit to the support in a predetermined position relative to the metrology system stimulus source, and the housing is sized and shaped so that the portable optic metrology thermal chamber module is portable as a unit for moving to and removing from the predetermined position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.