Apparatus for generating model for spectroscopic ellipsometry constant analysis and method therefor
US12105028B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 25, 2023 |
| Grant date | Oct 1, 2024 |
| Priority date | — |
| Expiry date | Sep 25, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/213
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of quality control and testing for manufactured semiconductors by generating a model for spectroscopic ellipsometry constant analysis includes: calculating, by an operator, simulation data representing a spectroscopic ellipsometry constant of an analysis target through reasoning on attribute data representing an attribute of the analysis target using a simulation model; calculating, by an error calculator, an error representing a difference between actual measured data obtained by measuring the spectroscopic ellipsometry constant of the analysis target and the simulation data; and performing optimization in which an optimizer modifies a parameter of the simulation model according to the error.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.