Annealing device and annealing method
US12106983B2 · kind B2 · utility
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6Claims
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Key dates
| Filing date | Jun 2, 2021 |
| Grant date | Oct 1, 2024 |
| Priority date | — |
| Expiry date | Apr 27, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/12
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
There is provided an annealing device including a heating unit that heats a surface of an annealing object to temporarily melt an outer layer portion, a sensor that detects thermal radiation light from the annealing object heated by the heating unit, and a processing unit that estimates an annealing result of the annealing object on the basis of a waveform showing a temporal change in an intensity of the thermal radiation light detected by the sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.