Patent · US Active

Safeguarding device, wafer transport container with at least one safeguarding device, safeguarding system and method with the safeguarding device

US12106987B2 · kind B2 · utility

0Cited by

4References

23Claims

0Family size

Assignee

VAT Holding AG · CH

Inventors

Florian Ehrne · Feldkirch, AT
Martin Netzer · Bludenz, AT
Andreas Hofer · Dormagen, DE

Key dates

Filing date	Mar 22, 2018
Grant date	Oct 1, 2024
Priority date	—
Expiry date	Jan 30, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67772
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A safeguarding device includes one or more positive-fit units that safeguard a wafer-transport-container opening element of a wafer transport container, which is held in its closure position by a closing mechanism. The closing mechanism includes one or more chambers, which includes a pressure connection channel that allows a variation of an inner pressure in the chamber relative to a reference pressure. A differential pressure is calculated from the inner pressure of the chamber and the reference pressure and influences a safeguarding status of the positive-fit unit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.