Vertical cavity surface emitting laser with integrated photodiode
US12107388B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 31, 2021 |
| Grant date | Oct 1, 2024 |
| Priority date | — |
| Expiry date | Jan 24, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/18347
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A vertical cavity surface emitting laser (VCSEL) emits laser light. The VCSEL has an optical resonator and a photodiode. The optical resonator has: a first mirror, an active region configured to generate laser light, and a second mirror. The active region is arranged between the first mirror and the second mirror. The photodiode is integrated in the optical resonator. The photodiode has: an absorption region having a plurality of absorbing layers configured to absorb the generated laser light. The absorbing layers are arranged spaced apart from one another by a distance d which satisfies the condition: d=(2k−1)λ/(4 m). Where λ is the wavelength of the laser light in the absorption region, and k and m are natural numbers ≥1.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.