Patent · US Active

MEMS-based photoacoustic cell

US12111249B2 · kind B2 · utility

0Cited by

2References

23Claims

0Family size

Assignee

Hahn-Schickard-Gesellschaft für Angewandte Forschung e. V. · DE

Inventors

Alfons Dehe · Reutlingen, DE
Achim Bittner · Heilbronn, DE
Lenny Castellanos · Oberndorf am Neckar, DE
Sophie Billat · Villingen-Schwenningen, DE
Frank Hedrich · Villingen-Schwenningen, DE

Key dates

Filing date	Aug 31, 2020
Grant date	Oct 8, 2024
Priority date	—
Expiry date	Mar 29, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG01N2201/0686
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

In a first aspect, the invention relates to a photoacoustic gas sensor comprising a gas-fillable detection chamber and a reference chamber arranged laterally adjacent to each other and connected by a sensor channel. A sensor located at or in the sensor channel allows measurement of the photoacoustic signals. Both chambers are preferably located in a plane perpendicular to the emitted IR radiation of the IR emitter which is also comprised. The gas sensor is also formed from a multilayer substrate.In further aspects, the invention also relates to a method of manufacturing a gas sensor and a method of analyzing gas with a gas sensor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.