Mass flow controller and flow control method therefor
US12111671B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 27, 2022 |
| Grant date | Oct 8, 2024 |
| Priority date | — |
| Expiry date | May 27, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/06
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A mass flow controller includes control module, fluid passage, flow regulating valve, flow sensor disposed between inlet and flow regulating valve, and pressure sensor disposed at outlet. The control module is configured to enter pressure feedback regulation mode when variation amount of target flow value exceeds preset threshold, and enter flow feedback regulation mode after fluid flow value detected by flow sensor meets first stabilization condition. The control module is configured to, in pressure feedback regulation mode, perform calculation according to fluid pressure value and target flow value to obtain opening regulation amount, and regulate opening degree of flow regulating valve according to opening regulation amount. The control module is also configured to, in flow feedback regulation mode, perform calculation according to fluid flow value and target flow value to obtain opening regulation amount, and regulate opening degree of flow regulating valve according to opening regulation amount.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.