Substrate transfer apparatus
US12112970B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 30, 2021 |
| Grant date | Oct 8, 2024 |
| Priority date | — |
| Expiry date | Jun 6, 2043 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G2249/045
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A substrate transfer apparatus includes a body portion having a holding region on a surface thereof corresponding to a substrate. The body portion moves so that the surface thereof approaches the substrate up to at least a first distance. A plurality of vacuum holes are distributed in the holding region and form negative pressure to provide suction force to the substrate disposed at the first distance. At least some of the plurality of vacuum holes are disposed at equal intervals at an edge of the holding region and have the same width. A plurality of air holes are distributed in the holding region and form positive pressure to provide a buoyancy force to the substrate close to the holding region at a second distance smaller than the first distance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.