Layout of XBARs with multiple sub-resonators in parallel
US12113512B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 20, 2021 |
| Grant date | Oct 8, 2024 |
| Priority date | — |
| Expiry date | Jun 22, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/025
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic filter devices and methods of making filter devices. An acoustic filter device includes a transversely-excited film bulk acoustic resonator (XBAR) including a plurality of sub-resonators and conductors to connect the plurality of sub-resonators in parallel between a first node and a second node. The conductors are configured such that a path length from the first node to the second node is effectively the same through each of the plurality of sub-resonators.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.