Hybrid optical fiber MEMS scanner
US12117609B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 23, 2020 |
| Grant date | Oct 15, 2024 |
| Priority date | — |
| Expiry date | Jan 29, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2027/0178
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical scanner includes a cantilevered optical member protruding from the base portion and a transducer assembly comprising one or more piezoelectric actuators coupled to the cantilevered optical member and configured to induce motion of the cantilevered optical member in a scan pattern. In some cases, the cantilevered optical member has a tapered shape with a distal end narrower than a proximal end adjacent to the base portion of the optical scanner. In some cases, the cantilevered optical member has an elongated width along a first plane and includes a plurality of waveguides. The transducer assembly is configured to induce motion of the cantilevered optical member in a second plane orthogonal to the first plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.