Method of fabricating display device having patterned lithium-based transition metal oxide
US12117630B2 · kind B2 · utility
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5References
28Claims
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Key dates
| Filing date | Mar 11, 2020 |
| Grant date | Oct 15, 2024 |
| Priority date | — |
| Expiry date | Jul 2, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2027/0174
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present disclosure generally relates to display systems, and more particularly to augmented reality display systems and methods of fabricating the same. A method of fabricating a display device includes providing a substrate comprising a lithium (Li)-based oxide and forming an etch mask pattern exposing regions of the substrate. The method additionally includes plasma etching the exposed regions of the substrate using a gas mixture comprising CHF3 to form a diffractive optical element, wherein the diffractive optical element comprises Li-based oxide features configured to diffract visible light incident thereon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.