Method for monitoring, determining the position of, and positioning a pin-lifting system
US12119247B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 18, 2020 |
| Grant date | Oct 15, 2024 |
| Priority date | — |
| Expiry date | Dec 6, 2040 |
Classification
- Technology area (CPC —)General
Abstract
Method for monitoring a state of a pin lifter device (10), wherein the pin lifter device (10) is designed for moving and positioning a substrate in a process atmosphere region (P). The pin lifter device (10) has a coupling (18) and a drive unit (12) having an electric motor, which is designed and interacts with the coupling (18) in such a way that the coupling (18) is adjustable from a lowered normal position into an individual active position and back. The method for monitoring includes progressively receiving a present item of motor current information with respect to a motor current applied to the electric motor, comparing the present motor current information to an item of target current information, and deriving an item of state information based on the comparison.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.