Transversely-excited film bulk acoustic resonator package and method
US12119798B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 12, 2023 |
| Grant date | Oct 15, 2024 |
| Priority date | — |
| Expiry date | Jan 12, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/023
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonator devices and filters are disclosed. A piezoelectric plate is attached to a substrate, a portion of the piezoelectric plate forming a diaphragm spanning a cavity in the substrate. A first conductor pattern is formed on a surface of the piezoelectric plate. The first conductor pattern includes interleaved fingers of an interdigital transducer disposed on the diaphragm, and a first plurality of contact pads. A second conductor pattern is formed on a surface of a base, the second conductor pattern including a second plurality of contact pads. Each pad of the first plurality of contact pads is connected to a respective pad of the second plurality of contact pads. A seal is formed between a perimeter of the piezoelectric plate and a perimeter of the base.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.