Transversely-excited film bulk acoustic resonator with spiral interdigitated transducer fingers
US12119806B2 · kind B2 · utility
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85References
17Claims
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Key dates
| Filing date | Dec 21, 2021 |
| Grant date | Oct 15, 2024 |
| Priority date | — |
| Expiry date | Dec 30, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/023
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonator devices, filers, and methods. An acoustic resonator includes a substrate and a piezoelectric plate, a portion of the piezoelectric plate being a diaphragm spanning a cavity in the substrate. A conductor pattern on a front surface of the piezoelectric plate includes interleaved interdigital transducer (IDT) fingers connected alternately to first and second busbars. The interleaved IDT fingers are on the diaphragm, and the interleaved IDT fingers include at least a first pair of interleaved spiral IDT fingers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.