Surface metrology systems and methods thereof
US12123701B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 12, 2021 |
| Grant date | Oct 22, 2024 |
| Priority date | — |
| Expiry date | Aug 12, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M11/0271
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for measuring the topography of a surface including a carriage assembly and a base assembly. The carriage assembly comprising a plurality of displacement-measuring probes coupled to a carriage support structure. The base assembly positioned adjacent to the carriage assembly and comprising at least one reference object with an opening sized to receive a test object. At least one of the carriage assembly or the base assembly is configured to translate with respect to the other in at least two directions to enable at least one of the displacement-measuring probes to measure a displacement to a reference surface of the reference object and at least another one of the displacement-measuring probes to measure a displacement to a target surface of the target object whose topography is measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.