Highly sensitive resonant force sensor with a test body and at least one resonant element decoupled and each disposed in a suitable environment

US12123792B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Théo Miani · Grenoble, FR
• Marc SANSA PERNA · Grenoble, FR

Key dates

• Filing date: Sep 22, 2022
• Grant date: Oct 22, 2024
• Expiry date: Oct 21, 2042

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/0831
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A force sensor including a support, a test body, two strain gauges, mechanical transmission means between the test body and the strain gauges so that a movement of the test body applies a strain onto the strain gauges in a first direction of the plane of the sensor, the transmission means being hinged relative to the support about a second direction in the plane of the sensor, the test body being accommodated within a first volume, the strain gauges being accommodated within a second volume, insulated by sealed insulation means. The sensor includes a sacrificial layer, a nanometric layer, a protective layer and a micrometric layer. The test body and at least one portion of the support are formed in the substrate, the sealed insulation means are partially formed by the nanometric layer and by the sacrificial layer, and the strain gauges are formed in the nanometric layer.