Multi-zone pedestal heater without vias
US12127310B2 · kind B2 · utility
1Cited by
0References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 16, 2022 |
| Grant date | Oct 22, 2024 |
| Priority date | — |
| Expiry date | Nov 11, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B2203/035
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A support pedestal includes a substrate, a plurality of resistive heating elements disposed on the substrate and defining a plurality of heating zones, and electric terminals disposed at a central region of the substrate. At least one of the electric terminals is connected to at least two of the plurality of resistive heating elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.