Interlocking proof mass for mems inertial sensing device
US12129167B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 25, 2022 |
| Grant date | Oct 29, 2024 |
| Priority date | — |
| Expiry date | Jul 27, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0871
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical systems (MEMS) inertial sensing device having a large proof mass with interlocking tabs is disclosed. The interlocking tabs limit motion of the proof mass when subjected to large inertial forces. The interlocking tabs are formed around the periphery of the proof mass and interact with corresponding interlocking tabs formed in a frame to which the proof mass is tethered. The motion of the proof mass is limited by the interlocking tabs, which are formed during MEMS fabrication of the inertial sensing device rather than as part of the packaging process. With a large proof mass, the inertial sensing device can provide high sensitivity in low inertial force environments while the interlocking tabs protect the device when subjected to high inertial forces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.