MEMS gyroscope for three-axis detection
US12130139B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 27, 2022 |
| Grant date | Oct 29, 2024 |
| Priority date | — |
| Expiry date | Jun 22, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5747
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS gyroscope for three-axis detection relates to the technical field of gyroscope and includes a substrate, a sensing unit elastically connected with the substrate, and a driving unit coupled with the sensing unit and driving the sensing unit to move. The substrate includes anchor point structures respectively located at four corners of the substrate and four coupling structures respectively elastically connected with the four anchor point structures. An avoiding space is formed between two adjacent coupling structures. The driving unit includes two driving pieces separately elastically connected with adjacent coupling structures. The two driving pieces are symmetrically arranged and are frame-shaped. The sensing unit includes four X and Y mass blocks, two Z mass blocks elastically connected with the driving pieces, and two decoupling mass blocks. The two decoupling mass blocks are elastically connected. The MEMS gyroscope is differentially driven, which realizes differential detection and reduces quadrature error.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.