Material processing apparatus and operating method thereof
US12136555B2 · kind B2 · utility
Inventor
Key dates
| Filing date | Mar 16, 2021 |
| Grant date | Nov 5, 2024 |
| Priority date | — |
| Expiry date | Jun 29, 2043 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J3/04
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A material processing apparatus includes a processing chamber having an internal space, an external pressure source, a vacuum generator, a temperature regulator and a controller. The external pressure source is connected to the processing chamber for positive pressure action on the internal space. The vacuum generator is connected to the processing chamber for negative pressure action on the internal space. The temperature regulator is arranged in the processing chamber to adjust the temperature in the internal space. The controller is configured to control the external pressure source to increase the pressure in the processing chamber from a normal pressure to a first predetermined pressure, and configured to control the vacuum generator to reduce the pressure in the processing chamber to a second predetermined pressure less than the normal pressure after the pressure rises to the first predetermined pressure. An operating method of a material processing apparatus is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.