Method and device for viewing and/or illuminating a target surface in an evacuated chamber having condensable vapor therein
US12140377B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 2, 2019 |
| Grant date | Nov 12, 2024 |
| Priority date | — |
| Expiry date | Feb 3, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P10/25
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for viewing and/or illuminating a target surface in an evacuated chamber having condensable vapor therein, the device comprising: a first section with a through hole having a first end with a first opening and a second end with a second opening; and a second section having a chamber comprising a first portion with a first opening, a second portion with a second opening and a gas inlet, where the second opening is covered with a first window, said first section is attached with the first end to the first portion of the chamber allowing free passage between the chamber and the first section, said gas inlet is connectable to a gas reservoir for feeding a gas into the chamber for prohibiting the first window in the chamber for being contaminated of the condensable vapor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.