Selective marking of a substrate with fluorescent conjugated polymer probes having a small form factor
US12140550B2 · kind B2 · utility
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16Claims
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Key dates
| Filing date | Jan 25, 2023 |
| Grant date | Nov 12, 2024 |
| Priority date | — |
| Expiry date | Feb 16, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A photoluminescent material can be applied to part of a substrate as part of substrate inspection. The photoluminescent material includes a conjugated polymer having a coiled macroscopic molecular shape and a meta-linkage or an ortho-linkage. The substrate is imaged using an inspection system. The conjugated polymer can be, for example, poly(m-phenylene ethynylene) (PPE) or poly(para-phenylene vinylene) (PPV).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.