Driving apparatus, exposure apparatus, and article manufacturing method
US12140874B2 · kind B2 · utility
0Cited by
1References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 11, 2022 |
| Grant date | Nov 12, 2024 |
| Priority date | — |
| Expiry date | Jan 9, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/646
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A driving apparatus includes a holding member configured to hold an object to be driven, a support member configured to support the holding member via an elastic member, a plurality of actuators configured to drive the holding member holding the object, and a constrainer configured to constrain, in a non-contact manner, a position of the holding member with respect to the support member in anon-driving direction different from a drivable direction which is a direction in which the holding member can be driven by the plurality of actuators.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.