Optical package having tunable filter
US12147030B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 11, 2021 |
| Grant date | Nov 19, 2024 |
| Priority date | — |
| Expiry date | Jun 4, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/02
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optoelectronic device, including a tunable optical filter or tunable optical filter with photodiode, uses voltage differentials to filter an optical signal passing along an optical path. A membrane has an electrode and is disposed adjacent a fixed mirror and another. A central portion of the membrane is distanced from the fixed mirror and has an aperture in which a second mirror is disposed. This second mirror translates with the membrane at a freespace gap relative to the fixed mirror when the electrodes are subject to the voltage differentials. In turn, the freespace gap is configured as a Fabry-Perot etalon to pass one or more spectral frequencies of the optical signal along the optical path. The membrane is shaped and reinforced to limit possible bowing. The translatable mirror in the aperture of the membrane is also shaped and reinforced to limit it from possible bowing as well.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.