Fluid introduction module for plasma system
US12150234B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 15, 2021 |
| Grant date | Nov 19, 2024 |
| Priority date | — |
| Expiry date | Feb 27, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/3463
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A fluid introduction module for plasma system is adapted for being disposed in a plasma system and includes a rotating nozzle and a precursor supply device. The rotating nozzle includes a main flow channel, a plasma outlet located at an end of the main flow channel, a mixing flow channel that penetrates a side wall of the rotating nozzle and communicates with the main flow channel, an independent flow channel separated from the main flow channel, and a precursor independent outlet located at an end of the independent flow channel. The precursor supply device includes a fixed housing and a rotating bearing. The fixed housing is sleeved outside the rotating nozzle and includes a precursor inlet selectively communicating with either the mixing flow channel or the independent flow channel. The rotating bearing is disposed between the rotating nozzle and the fixed housing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.